Thermomechanical Electromagnetic Radiation Detector

The electromagnetic radiation detector is composed of a metamaterial absorber, legs and a substrate, and is prepared on a transparent substrate using a surface sacrificial layer process to form a suspended movable structure where the legs support the metamaterial absorber. At this time, the electromagnetic wave energy incident on the metamaterial absorber is converted into heat energy, and the legs bend after the temperature changes; another beam of visible light is incident on the reflective mirror surface of the metamaterial absorber through the transparent substrate for The change and distribution of the deflection angle of the metamaterial absorber are read out to realize the detection and imaging of electromagnetic waves. The electromagnetic radiation detector provided by the invention has high sensitivity and resolution, good reliability and uniformity, low cost and simple preparation process It can be used as a radiation detector to work independently or in an array as an imaging device.It can be flexibly designed according to the wavelength of the detected electromagnetic wave and the actual application requirements.